光学材料的表征

Preface to the Reissue ofthe Materials Characterization Series

Preface to Series

Preface to the Reissue of Characterization of Optical Materials

Preface

Contributors

INTRODUCTION

PART 1 INFLUENCE OF SURFACEMORPHOLOGYAND

MICROSTRUCTURE ON OPTICAL RESPONSE

CHARACTERIZATION OF SURFACE ROUGHNESS

1.1 Introduction

1.2 WhatSurfaceRoughnessls

1.3 HowSurfaceRoughness AffctsOpticaIMeasurements

1.4 How Surface Roughness and ScatteringAre Measured

1.5 Characterization ofSelected Surfaces

1.6 Future Difections

CHARACTERIZATION OF THE NEAR-SURFACE REGION USING POIARIZATION-SENSITIVE OPTICAL TECHNIQUES

2.1 Introduction

2.2 Ellipsometry

ExperimentallmplementationsofEllipsometry 29, Analysisof

EllipsometryData

2.3 MicrostructuralDeterminationsfromEllipsometryData

Temperature Dependence ofthe Opticat Properties ofSilicon 34,

Determination ofthe Optical Functions ofGlasses Using SE 35,

SpectroscopicEllipsometryStudiesofSi02/Si 37, Spectroscopic

EllipsometryforComplicatedFilmStrucrures 38, Time-Resolved

Ellipsometry 40, Single-WavelengthReal-TimeMonitoringofFilm

Growth 41, Multiple-WavelengthReal-TimeMonitoringofFilm

Growth 42, Infrared EllipsometryStudies ofFilm Growth

THE COMPOSITION, STOICHIOMETRY, AND RELATED MICROSTRUCTURE OF OPTICAL MATERIALS

3.1 Introduction

3.2 AspectsofRamanScattering

3.3 III-VSemiconductor Systems

3.4 GroupIVMaterials

3.5 Amorphous and Microcrystalline Semiconductors

ChalcogenideGlasses 60, GroupIVMicrocrystallineSemiconductors

3.6 Summary

DIAMOND AS AN OPTICAL MATERIAL

4.1 Introduction

4.2 DepositionMethods

4.3 0pticalPropertiesofCVD Diamond

4.4 Defectsin CVD Diamond

4.5 PolishingCVD Diamond

4.6 X-rayWindow

4.7 Summary

PART 2 STABILITY AND MODIFICATION OF FILM AND SURFACE OPTICAL PROPERTIES

MULTIJAYER OPTICAL COATINGS

5.1 Introduction

5.2 Single-LayerOpticalCoatings

OpticaIConstants 90, CompositionMeasurementTechniques

5.3 MultilayerOpticalCoatings

CompositionaIAnalysis 107, SurfaceAnalyticaITechniques 108,

MicrostructuralAnalysis ofMultilayer Optical Coatings

5.4 StabilityofMultilayerOpticalCoatings

5.5 Future Compositional and

MicrostructuralAnalyticaITechniques

CHARACTERIZATION AND CONTROL OF STRESS IN OPTICAL FILMS

6.1 Introduction

6.2 0rigins ofStress

……

Characterization in Optica/ Materia/s provides information for understanding the properties and performance of optical materials under the influence of the various characterization techniques. Surface and interfacial properties are key to the optical response of a material， and their control and modification during materials processing is necessary to achieve desired behavior. Characterization of Optica/ Materia/s focuses on how surface morphology， microstructure， and chemical bonding influence the optical response of a material， and it illuminates methods used to characterize thin films， multilayer structures， and modified surfaces，