微传感器、微机电系统和灵巧器件

PrefaceAbout the AuthorsAcknowledgments1 Introduction 2 Electronic Materials and Processing 3 MEMS Materials and their Preparation 4 Standard Microelectronic Technologies5 Silicon Micromachining:Bulk6 Silicon Micromachining:Surface7 Microstereolithography for MEMS8 Microsensors9 Introduction to SAW Devices10 Surface Acoustic Waves in Solids11 IDT Microsensor Parameter Measurement12 IDT Microsensor Fabrication

PrefaceAbout the AuthorsAcknowledgments1 Introduction 2 Electronic Materials and Processing 3 MEMS Materials and their Preparation 4 Standard Microelectronic Technologies5 Silicon Micromachining:Bulk6 Silicon Micromachining:Surface7 Microstereolithography for MEMS8 Microsensors9 Introduction to SAW Devices10 Surface Acoustic Waves in Solids11 IDT Microsensor Parameter Measurement12 IDT Microsensor Fabrication13 IDT Microsensors14 MEMS-IDT Microsensors15 Smart Sensors and MEMSAppendicesIndex

微传感器、微机电系统（MEMS，micro=electro=mechanical systems）正在对半导体工业产生革命性的作用。微系统（microsystems）或片上系统（system-on-a-chip）将微电子电路和微执行器结合在一起，形成有广泛应用领域的新的研究热点。本书系统介绍微传器技术，并将微传感器、微机电系统和灵巧器件有机结合起来，适合微电子领域的高年级学生和研究人员、微传感器系统方面的工程师和开发人员阅读。由于本书内容丰富全面，对于机械、物理和材料方面的科研人员也很有参考价值。