表面形貌的光学测量

1 Introduction to Surface Texture Measurement Richard Leach

1.1 Surface Texture Measurement

1.2 Surface Profile and Areal Measurement

1.3 Areal Surface Texture Measurement

1.4 Surface Texture Standards and GPS

1.4.1 Profile Standards

1.4.2 Areal Specification Standards

1.5 Instrument Types in the ISO 25178 Series

1.5.1 The Stylus Instrument

1.5.2 Scanning Probe Microscopes

1.5.3 Scanning Electron Microscopes

1.5.4 Optical Instrument Types

1.6 Considerations When Choosing a Method

Acknowledgements

References

2 Some Common Terms and Definitions Richard Leach

2.1 Introduction

2.2 The Principal Aberrations

2.3 Objective Lenses

2.4 Magniflcation and Numerical Aperture

2.5 Spatial Resolution

2.6 Optical Spot Size

2.7 Field of View

2.8 Depth of Field and Depth of Focus

2.9 Interference Objectives

Acknowledgements

References

3 Limitations of Optical 3D Sensors Gerd H?usler,Svenja Ettl

3.1 Introduction:What Is This Chapter About?

3.2 The Canonical Sensor

3.3 Optically Rough and Smooth Surfaces

3.4 Type Ⅰ Sensors:Triangulation

3.5 Type Ⅱ and Type Ⅲ Sensors:Interferometry

3.6 Type Ⅳ Sensors:Deflectometry

3.7 Only Four Sensor Principles?

3.8 Conclusion and Open Questions

References

4 Calibration of Optical Surface Topography Measuring Instruments Richard Leach,Claudiu Giusca

4.1 Introduction to Calibration and Traceability

4.2 Calibration of Surface Topography Measuring Instruments

4.3 Can an Optical Instrument Be Calibrated?

4.4 Types of Material Measure

4.5 Calibration of Instrument Scales

4.5.1 Noise

4.5.2 Residual Flatness

4.5.3 Amplification,Linearity and Squareness of the Scales

4.5.4 Resolution

4.6 Relationship between the Calibration,Adjustment and Measurement Uncertainty

4.7 Summary

Acknowledgements

References

5 Chromatic Confocal Microscopy Francois Blateyron

5.1 Basic Theory

5.1.1 Confocal Setting

5.1.2 Axial Chromatic Dispersion

5.1.3 Spectral Decoding

5.1.4 Height Detection

5.1.5 Metrological Characteristics

5.1.5.1 Spot Size

5.2 Instrumentation

5.2.1 Lateral Scanning Configurations

5.2.1.1 Profile Measurement

5.2.1.2 Areal Measurement

5.2.2 Optoelectronic Controller

5.2.3 Optical Head

5.2.4 Light Source

5.2.5 Chromatic Objective

5.2.6 Spectrometer

5.2.7 Optical Fibre Cord

5.3 Instrument Use and Good Practice

5.3.1 Calibration

5.3.1.1 Calibration of Dark Level

5.3.1.2 Linearisation of the Response Curve

5.3.1.3 Calibration of the Height Amplification Coefficient

5.3.1.4 Calibration of the Lateral Ampliflcation Coefficient

5.3.1.5 Calibration of the Hysteresis in Bi-directional Measurement

5.3.2 Preparation for Measurement

5.3.3 Pre-processing

5.4 Limitations of the Technique

5.4.1 Local Slopes

5.4.2 Scanning Speed

5.4.3 Light Intensity

5.4.4 Non-measured Points

5.4.5 Outliers

5.4.6 Interference

5.4.7 Ghost Foci

5.5 Extensions of the Basic Principles

5.5.1 Thickness Measurement

5.5.2 Line and Field Sensors

5.5.3 Absolute Reference

5.6 Case Studies

Acknowledgements

References

6 Point Autofocus Instruments Katsuhiro Miura,Atsuko Nose

6.1 Basic Theory

6.2 Instrumentation

6.3 Instrument Use and Good Practice

6.3.1 Comparison with Roughness Material Measures

6.3.2 Three-Dimensional Measurement of Grinding Wheel Surface Topography

6.4 Limitations of PAI

6.4.1 Lateral Resolution

6.4.2 Vertical Resolution

6.4.3 The Maximum Acceptable Local Surface Slope

6.5 Extensions of the Basic Principles

6.6 Case Studies

6.7 Conclusion

References

7 Focus Variationl Instruments Franz Helmli

7.1 Introduction

7.2 Basic Theorg

7.2.1 How Does It Work?

7.2.2 Acquisition of Image Data

7.2.3 Measurement of 3D Information

7.2.4 Post-processing

7.2.5 Handling of Invalid Points

7.3 Difference to Other Techniques

7.3.1 Difference to Imaging Confocal Microscopy

7.3.2 Difference to Point Auto Focusing Techniques

7.4 Instrumentation

7.4.1 Optical System

7.4.2 CCD Sensor

7.4.3 Light Source

7.4.4 Microscope Obiective

7.4.5 Driving Unit

7.4.6 Practical Instrument Realisation

7.5 Instrument Use and Good Practice

7.6 Limitations of the Technology

7.6.1 Translucent Materials

7.6.2 Measurable Surfaces

7.7 Extensions of the Basic Principles

7.7.1 Repeatability Information

7.7.2 High Radiometric Data Accluisition

7.7.3 2D Alignment

7.7.4 3D Alignment

7.8 Case Studies

7.8.1 Surface Texture Measurement of Worn Metal Parts

7.8.2 Form Measurement of Complex Tap Parameters

7.9 Conclusion

Acknowledgements

References

8 Phase Shifting Interferometry Peter de Groot

8.1 Conceot and Overview

8.2 Principles of Surface Measurement Interferometry

8.3 Phase Shifting Method

8.4 Phase Unwrapping

8.5 Phase Shifting Error Analysis

8.6 Interferometer Design

8.7 Lateral Resolution

8.8 Focus

8.9 Light Sources

8.10 Calibration

8.11 Examples of PSI Measurement

References

9 Coherence Scanning Interferometry Peter de Groot

9.1 Conceot and Overview

9.2 Terminology

9.3 Typical Configurations of CSI

9.4 Signal Formation

9.5 Signal Processing

9.6 Foundation Metrics and Height Calibration for CSI

9.7 Dissimilar Materials

9.8 Vibrational Sensitivity

9.9 Transparent Films

9.10 Examples

9.11 Conclusion

References

10 Digital Holographic Microscopy Tristan Coolmb,Jonas Kühn

10.1 Introduction

10.2 Basic Theory

10.2.1 Acquisition

10.2.2 Reconstruction

10.3 Instrumentation

10.3.1 Light Source

10.3.2 Digital Camera

10.3.3 Microscope Obiective

10.3.4 Optical Path Retarder

10.4 Instrument Use and Good Practice

10.4.1 Digital Focusing

10.4.2 DHM Parameters

10.4.3 Automatic Working Distance in Reflection DHM

10.4.4 Sample Preoaration and Immersion Liquids

10.5 Limitations of DHM

10.5.1 Parasitic Interferences and Statistical Noise

10.5.2 Height Measurement Range

10.5.3 Sample Limitation

10.6 Extensions of the Basic DHM Principles

10.6.1 Multi-wavelength DHM

10.6.1.1 Extended Measurement Range

10.6.1.2 Mapping

10.6.2 Stroboscopic Measurement

10.6.3 DHM Reflectometry

10.6.4 Infinite Focus

10.6.5 Applications of DHM

10.6.5.1 Topography and Defect Detection

10.6.5.2 Roughness

10.6.5.3 Micro-optics Characterization

10.6.5.4 MEMS and MOEMS

10.6.5.5 Semi-transparent Micro-structures

10.7 Conclusions

References

11 Imaging Confocal Microscopy Roger Artigas

11.1 Basic Theory

11.1.1 Introduction to Imaging Confocal Microscopes

11.1.2 Working Principle of an Imaging Confocal Microscope

11.1.3 Metrological Algorithm

11.1.4 Image Formation of a Confocal Microscope

11.1.4.1 General Description of a Scanning Microscope

11.1.4.2 Point Spread Function for the Limiting Case of an Infinitesimally Small Pinhole

11.1.4.3 Pinhole Size Effect

11.2 Instrumentation

11.2.1 Types of Confocal Microscopes

11.2.1.1 Laser Scanning Confocal Microscope Configuration

11.2.1.2 Disc Scanning Confocal Microscope Configuration

11.2.1.3 Programmable Array Scanning Confocal Microscope Configuration

11.2.2 Objectives for Confocal Microscopy

11.2.3 Vertical Scanning

11.2.3.1 Motorised Stares with Optical Linear Encoders

11.2.3.2 Piezoelectric Stages

11.2.3.3 Comparison between Motorised and Piezoelectric Scanning Stages

11.3 Instument Use and Good Practice

11.3.1 LocatiOn of an Imaging Confocal Microscope

11.3.2 Setting Up the Sample

11.3.3 Setting the Right Scanning Parameters

11.3.4 Simultaneous Detection of Confocal and Bright Field Images

11.3.5 Sampling

11.3.6 Low Magniflcation against Stitching

11.4 Limitatioas of Imaging Confocal Microscopy

11.4.1 Maximum Detectable Slope on Smooth Surfaces

11.4.2 Noise and Resolution in Imaging Confocal Microscopes

11.4.3 Errors in Imaring Confocal Microscopes

11.4.3.1 Objective Flatness Error

11.4.3.2 Calibration of the Flatness Error

11.4.3.3 Measurements on Thin Transparent Materials

11.4.4 Lateral Resolution

11.5 Measurement of Thin and Thick Film with Imaging Confocal Microscopy

11.5.1 Introduction

11.5.2 Thick Films

11.5.3 Thin Films

11.6 Case Study:Roughness Prediction on Steel Plates

References

12 Light Scattering Methods Theodore V.Vorburger,Richard Silver,Rainer Brodmann,Boris Brodmann,J?rg Seewig

12.1 Introduction

12.2 Basic Theory

12.3 Instrumentation and Case Studies

12.3.1 Early Developments

12.3.2 Recent Developments in Instrumentation for Mechanical Engineering Manufacture

12.3.3 Recent Developments in Instrumentation for Semiconductor Manufacture(Optical Critical Dimension)

12.4 Instrument Use and Good Practice

12.4.1 SEMI MF 1048-1109(2009)Test Method for Measuring the Effective Surface Roughness of Optical Components by Total Integrated Scattering

12.4.2 SEMI ME 1392-1109(2009)Guide for Angle-Resolved Optical Scatter Measurements on Specular or Diffuse Surfaces

12.4.3 ISO10110-8:2010 Optics and Photonics-Preparation of Drawings for Optical Elements and Systems-Part 8:Surface Texture

12.4.4 Standards for Gloss Measurement

12.4.5 VDA Guideline 2009,Geometrische Produktspezifikation Oberfl?chenbeschaffenheit Winkelaufgel?ste Streulichtmesstech-nik Definition,Kenngr?βen und Anwendung(Light Scattering Measurement Technique)

12.5 Limitations of the Technique

12.6 Extensions of the Basic Principles

Acknowledgements

References

Index

《表面形貌的光学测量》介绍了表面形貌测量领域中一系列国际标准规范。复杂的准则都是基于新的测量技术而产生的。目前有很多用来测量表面形貌新的光学技术，每种方法都有其优点以及局限性。本书既适用于业界及学术研究领域的工程人员， 也适用于相关领域的研究生及高年级本科生。